This PHI 5600 XPS system has both a standard x-ray source and ... This glove box allows oxygen-sensitive films to be removed from the PVD chamber without air exposure. A hot wall ALD reactor is also ...

The HELIOS coating systems bring atomic-level control, film quality and conformal performance of ALD to commercial manufacturing ... the all-time records of legacy PVD and CVD equipment. The HELIOS ...

PVD techniques, such as sputtering and thermal evaporation ... conformal films with excellent step coverage. ALD is a highly precise and controlled deposition method that involves the sequential ...